In addition to the models listed above, we also have a variety of other models available.
For further details, please see our catalog or contact us directly.
PRODUCTS
XY stage for exposure/high precision inspection equipment SA/SL Series
Precision positioning device XY stage
Achieves high speed stability and positioning accuracy by adopting a low center of gravity H-shaped structure
By making installed parts optional, it is possible to meet the needs of various customers.
Reaction force processing mechanism that realizes high precision drive at high speed and high acceleration/deceleration (1m/s, 1G)
By making installed parts optional, it is possible to meet the needs of various customers.
Reaction force processing mechanism that realizes high precision drive at high speed and high acceleration/deceleration (1m/s, 1G)
Specifications (SA-500)
| Items | Lower axis | Upper axis |
|---|---|---|
| Stroke | 475mm | 500mm |
| Maximum speed | 500mm/s | 1,000mm/s |
| Drive system | Linear motor | |
| Guide | Air guide + rolling guide | Air guide |
| Foot print | 1240mm×1040mm | |
| Weight | 1,500kg | |
High-speed support options
Our unique reaction force processing unit (RFC) minimizes stage vibration during high acceleration/deceleration movement, achieving high positioning accuracy and shortening settling wait time. This RFC suppresses vibrations in applications such as optical systems mounted on the surface plate of the stage, contributing to the high throughput required for next-generation equipment.
High response Z-axis mechanism
Our Z-axis mechanism uses static pressure guides, voice coil motors, and unique high-speed control technology. This enables high-precision, high-response control and high-speed tracking of the sample surface height during scanning operations.
Registered patents
Japan
2970802, 3194246, 3438131, 3940277, 3940388, 4095480, 4223714, 4323087, 4327672, 4335704, 4335425, 4231486, 4377424, 4391883
South Korea
541171, 659479, 909585
China
ZL200410055992.4, ZL200410031436.3, ZL200410030272.2, ZL200580013948.X, ZL200580018883.8
Taiwan
I234333, I316588, I307916
Other patents pending