- Laser processing system
- Laser oscillator
- Fine brazing
- Laser application
- Laser annealing system
- Excimer laser annealing system
- DPSS laser annealing system
- Laser patterning system
- CO2 laser drilling system
Top >> Products >> Laser system products >> Laser annealing system >> DPSS Laser Annealing System GLE/SWA Series
Sumitomo developed its original diode-pumped solid-state, double-pulsed laser annealing system.
GLE/SWA series provides the stable production in high performance: high pulse energy stability, precise pulse control, high repetition rates, maintenance free, and compact design.
GLE/SWA Series Specifications
for FPD application : GLE-4300
for Semiconductor application : SWA-4300
| Items | for FPD GLE-4300 / GLE-9700 |
for Semiconductor SWA-90GD |
|
|---|---|---|---|
| Work Size | ～730x920mm | ～φ300mm | |
| Laser Output | 75W x 2 (Double Pulse) | ||
| Repetition Rate | 25mJ@3kHz | ||
| Energy Stability | ≤3% (rms) | ||
| Pulse Delay | 0～333us | ||
| Delay Fluctuation | ≤20ns (rms) | ||
| Beam Size | Length | <50um | <0.25mm |
| Width | ～150mm | ～25mm | |
| Process Atmosphere | N2/Air | ||
| Process Temperature | R.T. | ||
Sumitomo Heavy Industries, Ltd. Sales Department Group 2, Mechatronics Division
