Key components in vacuum air servo stages

These system features are supported by the following components:

Motion controller

The high-performance motion controller can coordinate multiple axes (motion control, stage servo control) and incorporate an optimal control algorithm for the equipment at high speed. In conjunction with components such as the servo controller, position measurement signal processing unit (PMIF), and remote I/O in a dedicated high-speed network, the controller provides a fully synchronized multi-axis control system with a fully digital interface.

Incorporating a stage control software package, this unit serves as a controller for both the air stage system and the ultra high-precision XY stage. Supports Ethernet communication (TCP/IP) and is easy to control using other controllers, enabling fast and high-volume exchange of control data. Adjustment software is also provided to streamline equipment adjustment and test runs.

Servo controller

Dedicated controller for slider control, featuring a proprietary control algorithm for high-speed servo calculation, a disturbance observer, and pneumatic actuator control. Sends commands to two opposing servo valves, achieving high responsiveness. Two units can also be combined for translation and yaw axis control for two axes.

Length measurement unit

The length measurement unit (PMIF) is a VME bus rack-mounted signal processing unit for position measurement. Stage position measurement values are captured from position sensors. As position measurement values, the unit can capture interferometer output, linear scale signals, and high-speed communication (LVDS). It is equipped with functions essential for ultra high-precision scanning, such as interpolation, pitch and alignment error correction, and environment correction (when a laser interferometer is used). Proprietary hardware processing enables output of highly precise timing pulses synchronized with the stage position.

Valve control unit

Dedicated valve control unit for air sliders (equipped with a high-speed, highly responsive air servo valve and pressure sensor) used in pneumatic actuator drive. Adopting a standard spool-type air servo valve, this unit maintains the flow output characteristics and control needed for fast acceleration/deceleration and high-precision operation of the pneumatic actuator.

Pneumatic actuator

A high-precision actuator with high repeatability that can be driven by air pressure alone. Enables fully non-contact operation from air bearings on each side, with a slider driven by differential pressure control from opposing servo valves. Recovering air supplied to air bearings from exhaust grooves in the slider enables the actuator to maintain a high vacuum within vacuum chambers.