Video Library
GL Series
Linear Ball Guided Gantry Moving Type Stage
SA/SL Series
Planar XY Stage for Short Travel
Top >> Video Library >> SA&SL Series Planar XY Stage for Short Travel

Semiconductor: XY Stage for Inspection and Exprosure process

SA&SL Series Planar XY Stage for Short Travel
(1) Introduction for XY Stage by animation

  • (2) XY Stage motion

    (1) Introduction for XY Stage by animation

    A precision positioning machine, which is used to inspect and exposure of semiconductor wafer. Introduction of XY stage and summary by animation.

    [ 02:18 ]
  • (1) Introduction for XY Stage by animation

    (2) XY Stage motion

    Introduction of XY stage’s slider motions, that are driven at 1m/sec and 1G.

    [ 01:03 ]
Contact Us

Sumitomo Heavy Industries Mechatronics, Ltd.　Stage System Sales Section, Sales Department I

pagetop