- Laser annealing system
- Molding machine
- Precision Positioning machine XY Stage
- Laser annealing system
- Precision Positioning machine XY Stage
- XY stage for inspection and processing system TL Series
- XY stage for exposure and high accuracy inspection system SA&SL Series
- Control system for film coating
- Motion controller
- Servo driver
- Linear motor
- Motion controller
- Servo driver
- Linear motor
- Air actuator
Top >> Products >> Products for Semi./LED processing >> Precision Positioning machine XY Stage >> Planar XY stage for short travel SA&SL Series
Lower priced stage with high precision and high throughput
Linear motor driving stage with high throughput
High precision by using Reaction Force Canceller
TL-400 specifications
| Item | Lower axis (X axis) | Upper axis (Y axis) |
|---|---|---|
| Travel range | 400mm | 350mm |
| Maximum velocity | 1000mm/s | 1000mm/s |
| Motor type | Linear motor | Linear motor |
| Guide | Linear ball guide | Linear ball guide |
| Footprint | 800x800mm | |
| Height | 800mm（base unit included） | |
| Weight | 300kg | |
*1 Depends on type of motor and optional parts selected.
Patented
Japan:2970802, 3194246
The other applications are patent pending.
Sumitomo Heavy Industries Mechatronics, Ltd. Stage System Sales Section, Sales Department I
