XY stage for inspection and processing system
TL Series

High-speed wafer and substrate positioning
Machine vibration reduced to a minimum
Options for Z and θ axis

XY stage for exposure and high accuracy inspection system
SA&SL Series

Ideal for high-speed wafer scanning
Machine vibration reduced to a minimum
Options for Z and θ axis

Sumitomo Heavy Industries Mechatronics, Ltd.　Stage System Sales Section, Sales Department I