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Laser annealing system

Excimer Laser Annealing System ELA Series

Excimer Laser Annealing System ELA Series

The best suitable system to the mass production of low temperature poly-silicon TFT's.
This ELA series that pursued modulization with the laser and optic system made by own company.
The line-up of the system is up to 730x920 mm size substrate as a standard.
The ELA-TW series is the mass production system of the high throughput correspondence that installed the total systems including 2 sets of the Excimer lasers and optics.

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DPSS Laser Annealing System GLE/SWA Series

DPSS Laser Annealing System GLE/SWA Series

Sumitomo developed its original diode-pumped solid-state, double-pulsed laser annealing system.
GLE/SWA series provides the stable production in high performance: high pulse energy stability, precise pulse control, high repetition rates, maintenance free, and compact design.

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Laser patterning system

Laser patterning system

Sumitomo offers various patterning process to the various kinds material.
Recently, laser patterning process to the thin coated film on the solar cell, flat panel such as LCD, PDP etc. is paid attention.
We provides the solutions of the laser processing to thin coated film.

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Sumitomo Heavy Industries, Ltd. Sales Department Group 2, Mechatronics Division