- Laser annealing system
- Precision Positioning machine XY Stage
- XY stage for inspection and repair system GL Series
- XY stage for coater GA Series
- XY stage for high precision laser process and inkjet system LA Series
- Control system for film coating
- Motion controller
- Servo driver
- Linear motor
Granite base and air guide provide a high degree of flatness and straightness Unique table support mechanism ensures stable processing.
LA3800 specifications
| Item | Lower axis (X axis) | Upper axis (Y axis) |
|---|---|---|
| Substrate size | G8 | |
| Travel range | 3800mm | 280mm |
| Maximum velocity | 350mm/s | 200mm/s |
| Motor type | Linear motor | Linear motor |
| Guide | Air guide | Linear ball guide |
| Footprint | 7700×4200mm | |
| Weight | 32000kg | |
*1 Depends on type of motor and optional parts selected.
Top table support
Both the air guides that support the top table and the air guides for the upper and lower sliders are located on the granite base. This not only helps to keep the area of the granite base to a minimum, it also allows stable movement even when a larger top table is used.
Patented
Japan:2970802, 3194246, 4209983, 4322762, 4327672, 4291313, 4402078
Korea:852876, 919391
China:ZL200580013948.X, ZL200580018883.8, ZL200710110052.4
The other applications are patent pending.
Sumitomo Heavy Industries Mechatronics, Ltd. Stage System Sales Section, Sales Department I
