- Laser annealing system
- Precision Positioning machine XY Stage
- XY stage for inspection and repair system GL Series
- XY stage for coater GA Series
- XY stage for high precision laser process and inkjet system LA Series
- Control system for film coating
- Motion controller
- Servo driver
- Linear motor
Top >> Products >> Products for FPD/PV/OLED processing >> Precision Positioning machine XY Stage >> XY stage for inspection and repair system GL Series
Low-cost steel beam structure
Complete line from G4 to G10 stages
Light weight gantry for high throughput
Specification
| Model | (Unit) | GL1000 | GL1400 | GL1600 | GL1940 | GL2400 | GL2700 | GL3200 |
|---|---|---|---|---|---|---|---|---|
| Substrate size | G4 | G5 | G5.5 | G6 | G7 | G8 | G10 | |
| Travel range | m | 1.0 | 1.4 | 1.6 | 2.0 | 2.4 | 2.7 | 3.2 |
| Weight(※1) | kg | 1300 | 1700 | 2100 | 2600 | 3000 | 3200 | 4500 |
| Maximum load capacity on gantry | kg | 160 | ||||||
| Maximum velocity | m/s | 1.6 | ||||||
| Footprint | m | 1.8×1.8 | 2.2×2.4 | 2.2×2.6 | 2.7×3.0 | 2.7×3.5 | 3.0×3.8 | 3.8×4.1 |
Modularize stages
Large GL Series is modular in the stage base. Modular design allows smaller shipping and crating packaging.
Light weight gantry
Gantry beams produce light weight and high stiffness. Light weight and high rigidity G8 stage made it possible to reduce the weight by 30% of that of our existing stages. The number of gantries and moving axes on gantry can be designed to meet customers’ requirements.
Patented
Japan:2970802, 3194246, 4138858, 4150411, 4248582, 4328364, 4402078
Korea:628699, 835576
Taiwan:I261041
The other applications are patent pending.
Sumitomo Heavy Industries Mechatronics, Ltd. Stage System Sales Section, Sales Department I
